CSG30/Pt series specification
Material
Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
Chip size
3.4x1.6x0.3mm
Reflective side
Pt
Conductive coating
PtIr (25nm), Cr adhesion layer (25A)
Cantilever number
1 rectangular
Tip curvature radius
~ 35nm
Also available coatings
conductive TiN, Au;
Available CSG30 probe
bare, tipless, with Al reflective coating
Cantilever series
Cantilever length, L±5µm
Cantilever width, W±3µm
Cantilever thickness,
T±0.5 µm
Resonant frequency, kHz
Force constant, N/m
min
typical
max
CSG30
190
30
1.5
26
48
76
0.13
0.6
2