NSG01/Pt series specification
Material
Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
Chip size
3.4x1.6x0.3mm
Reflective side
PtIr
Conductive coaPtg
PtIr (25nm), Cr adhesion layer (25A)
Cantilever number
1 rectangular
Tip curvature radius
~ 35nm
Also available coaPtgs
conductive Au, TiN;
magnetic CoCr
Available NSG01 probe
bare, tipless, with Al reflective coating
Cantilever series
Cantilever length, L±5µm
Cantilever width, W±3µm
Cantilever thickness,
T±0.5 µm
Resonant frequency, kHz
Force constant, N/m
min
typical
max
NSG01
125
30
2.0
87
150
230
1.45
5.1
15.1